21 December 2013 Design and fabrication of micro-bolometer array with double layers structure
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Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470I (2013); doi: 10.1117/12.2037899
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
In order to increase the fill factor of small size micro-bolometer, double layer micro-bolometer was designed in this paper with bottom sensitive/ top absorber structure. The deformation and residual stress characters of single layer and double layer structure models were simulated and optimized, and with the optimized results, double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes. The surface image and deformation information of the fabricated micro-bolometer was tested. By using double layer structure, the area of membrane increases by a factor of 1.99 and 3.6 for the “L” shape leg structure and long “S” shape structure, respectively.
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Jun Wang, Jun Gou, Weizhi Li, Deen Gu, Yadong Jiang, "Design and fabrication of micro-bolometer array with double layers structure", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470I (21 December 2013); doi: 10.1117/12.2037899; http://dx.doi.org/10.1117/12.2037899
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KEYWORDS
Silicon films

Absorption

Electrodes

Microelectromechanical systems

Thin films

Infrared detectors

Metals

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