21 December 2013 Design and fabrication of micro-bolometer array with double layers structure
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Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470I (2013) https://doi.org/10.1117/12.2037899
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China
Abstract
In order to increase the fill factor of small size micro-bolometer, double layer micro-bolometer was designed in this paper with bottom sensitive/ top absorber structure. The deformation and residual stress characters of single layer and double layer structure models were simulated and optimized, and with the optimized results, double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes. The surface image and deformation information of the fabricated micro-bolometer was tested. By using double layer structure, the area of membrane increases by a factor of 1.99 and 3.6 for the “L” shape leg structure and long “S” shape structure, respectively.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Wang, Jun Wang, Jun Gou, Jun Gou, Weizhi Li, Weizhi Li, Deen Gu, Deen Gu, Yadong Jiang, Yadong Jiang, } "Design and fabrication of micro-bolometer array with double layers structure", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470I (21 December 2013); doi: 10.1117/12.2037899; https://doi.org/10.1117/12.2037899
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