Improvements of self-assembly properties via homopolymer addition or block-copolymer blends

X. Chevalier; C. Nicolet; R. Tiron; Ahmed Gharbi; M. Argoud; C. Couderc; Guillaume Fleury; G. Hadziioannou; I. Iliopoulos; C. Navarro

doi:10.1117/12.2046329

28 March 2014 Improvements of self-assembly properties via homopolymer addition or block-copolymer blends

X. Chevalier, C. Nicolet, R. Tiron, Ahmed Gharbi, M. Argoud, C. Couderc, Guillaume Fleury, G. Hadziioannou, I. Iliopoulos, C. Navarro

Author Affiliations +

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 90490T (2014) https://doi.org/10.1117/12.2046329
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

The properties of cylindrical poly(styrene-b-methylmethacrylate) (PS-b-PMMA) BCPs self-assembly in thinfilms are studied when the pure BCPs are blended either with a homopolymer or with another cylindrical PS-b-PMMA based BCP. For both of these approaches, we show that the period of the self-assembled features can be easily tuned and controlled, and that the final material presents interesting characteristics, such as the possibility to achieve thicker defects-free films, as compared to pure block-copolymers having the same period. Moreover, a statistical defectivity study based on a Delaunay triangulation and Voronoi analysis of the self-assemblies made with the different blends is described, and prove that despite their high value of polydispersity index, these blends exhibit also improved selfassembly properties (bigger monocrystalline arrangements and enhanced kinetics of defects annihilation) as compared to pure and monodisperse block-copolymers. Finally, the behavior of the blends is also compared to the ones their pure counter-part in templated approach like the contact-hole shrink to evaluate their respective process-window and response toward this physical constrain for lithographic applications.

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X. Chevalier, C. Nicolet, R. Tiron, Ahmed Gharbi, M. Argoud, C. Couderc, Guillaume Fleury, G. Hadziioannou, I. Iliopoulos, and C. Navarro "Improvements of self-assembly properties via homopolymer addition or block-copolymer blends", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490T (28 March 2014); https://doi.org/10.1117/12.2046329

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