Fluorine coatings for nanoimprint lithography masks

Thomas E. Seidel; Alexander Goldberg; Mathew D. Halls

doi:10.1117/12.2057117

28 March 2014 Fluorine coatings for nanoimprint lithography masks

Thomas E. Seidel, Alexander Goldberg, Mathew D. Halls

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 90491S (2014) https://doi.org/10.1117/12.2057117
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

A structure and method for coating Nano Imprint Lithography (NIL) masks is described. The approach uses conformal ALD layering methods and sequential monomolecular depositions. The processes describe chemically bonded, high density, smooth coatings having fractional fluorine terminations. Various molecular precursor mixtures or various reactive surface site chemical functionalization schemes allow the attainment of controlled percentages of fractional F-terminations. The percentage of fluorine terminations is adjustable and controllable from 0% to 100%. Chemistries are described that result in coating layers of the order of ~1nm. These fractional F-terminated coatings may be useful for the reduction and minimization of defects in advanced imprint lithography processes.

Citation Download Citation

Thomas E. Seidel, Alexander Goldberg, and Mathew D. Halls "Fluorine coatings for nanoimprint lithography masks", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90491S (28 March 2014); https://doi.org/10.1117/12.2057117

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