Translator Disclaimer
Paper
28 March 2014 Development of fast DSA simulation method using OCTA system
Author Affiliations +
Abstract
We proposed the DSA simulation technique which is the combined method of two dimensional (2D) SCF and three dimensional (3D) dissipative particle dynamics (DPD) methods by using the density biased Monte Carlo method. This combined method has advantages of both an accuracy of SCF and fast and stably-working simulation of 3D DPD methods regardless of the strong segregation regime. Using our techniques, several results, such as DSA film structure on the chemical guide, are obtained. We also discuss the availability of our simulation technique using our free software, OCTA (in detail, see http://octa.jp) system.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Morita "Development of fast DSA simulation method using OCTA system", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90492O (28 March 2014); https://doi.org/10.1117/12.2046090
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top