14 April 2014 Parallel SPM cantilever arrays for large area surface metrology and lithography
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In this paper technology of scanning probe microscopy (SPM) surface metrology using arrays of piezoresistive thermally actuated cantilevers is discussed. The cantilever architecture presented here makes it possible to image surface topography using sensors operating in parallel. In this way the throughput of the sample imaging is increased, which is of crucial importance in measurements of large area samples. Application of piezoresistive detection scheme makes it possible to investigate quantitatively the interaction between the microprobe and the imaged surface. Integration of the thermal deflection actuator with the spring beam decreases the response time and enables fast and high resolution control of the tip sample distance. The results of topography parallel measurement using 1×4 cantilever array will be presented.
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Teodor Gotszalk, Teodor Gotszalk, Tzvetan Ivanov, Tzvetan Ivanov, Ivo W. Rangelow, Ivo W. Rangelow, "Parallel SPM cantilever arrays for large area surface metrology and lithography", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90500W (14 April 2014); doi: 10.1117/12.2046348; https://doi.org/10.1117/12.2046348

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