Macroscopic exploration and visual quality inspection of thin film deposit

Simon-Frédéric Désage; Gilles Pitard; Hugues Favrelière; Maurice Pillet; Olivier Dellea; Pascal Fugier; Philippe Coronel; Emmanuel Ollier

doi:10.1117/12.2046246

2 April 2014 Macroscopic exploration and visual quality inspection of thin film deposit

Simon-Frédéric Désage, Gilles Pitard, Hugues Favrelière, Maurice Pillet, Olivier Dellea, Pascal Fugier, Philippe Coronel, Emmanuel Ollier

Author Affiliations +

Proceedings Volume 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII; 90502G (2014) https://doi.org/10.1117/12.2046246
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Micro/nanotechnologies evolve causing an evolution of surface characterization systems of thin films. Today, these systems are not adapted to the future needs (or current) to characterize and qualify a large effective area within industrial production. This concerns the thin film active layers or simple mask for structuring the surface. This paper proposes a quality control method for thin films of self-assembled particles and high quality. This method is founded on the intersection of several skills available in our laboratories: Industrial process of visual inspection, optical methods for quality control (large area relative to the state of the art) and advances in micro/nanotechnology (CEA/Liten).

Citation Download Citation

Simon-Frédéric Désage, Gilles Pitard, Hugues Favrelière, Maurice Pillet, Olivier Dellea, Pascal Fugier, Philippe Coronel, and Emmanuel Ollier "Macroscopic exploration and visual quality inspection of thin film deposit", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90502G (2 April 2014); https://doi.org/10.1117/12.2046246

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available