2 April 2014 Macroscopic exploration and visual quality inspection of thin film deposit
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Micro/nanotechnologies evolve causing an evolution of surface characterization systems of thin films. Today, these systems are not adapted to the future needs (or current) to characterize and qualify a large effective area within industrial production. This concerns the thin film active layers or simple mask for structuring the surface. This paper proposes a quality control method for thin films of self-assembled particles and high quality. This method is founded on the intersection of several skills available in our laboratories: Industrial process of visual inspection, optical methods for quality control (large area relative to the state of the art) and advances in micro/nanotechnology (CEA/Liten).
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Simon-Frédéric Désage, Simon-Frédéric Désage, Gilles Pitard, Gilles Pitard, Hugues Favrelière, Hugues Favrelière, Maurice Pillet, Maurice Pillet, Olivier Dellea, Olivier Dellea, Pascal Fugier, Pascal Fugier, Philippe Coronel, Philippe Coronel, Emmanuel Ollier, Emmanuel Ollier, } "Macroscopic exploration and visual quality inspection of thin film deposit", Proc. SPIE 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 90502G (2 April 2014); doi: 10.1117/12.2046246; https://doi.org/10.1117/12.2046246

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