Understanding fundamental properties of photoresists and how interactions between photoresist components affect
performance targets are crucial to the continued success of photoresists. More specifically, polymer solubility is critical
to the overall performance capability of the photoresist formulation. While several theories describe polymer solvent
solubility, the most common industrially applied method is Hansen’s solubility parameters. Hansen’s method, based on
regular solution theory, describes a solute’s ability to dissolve in a solvent or solvent blend using four physical properties
determined experimentally through regression of solubility data in many known solvents. The four physical parameters
are dispersion, polarity, hydrogen bonding, and radius of interaction. Using these parameters a relative cohesive energy
difference (RED), which describes a polymer’s likelihood to dissolve in a given solvent blend, may be calculated.
Leveraging a high throughput workflow to prepare and analyze the thousands of samples necessary to calculate the
Hansen’s solubility parameters from many different methacrylate-based polymers, we compare the physical descriptors
to reveal a large range of polarities and hydrogen bonding. Further, we find that Hansen’s model correctly predicts the
soluble/insoluble state of 3-component solvent blends where the dispersion, polar, hydrogen-bonding, and radius of
interaction values were determined through regression of experimental values. These modeling capabilities have
allowed for optimization of the photoresist solubility from initial blending through application providing valuable
insights into the nature of photoresist.