Improved adhesion of novolac and epoxy based resists by cationic organic materials on critical substrates for high volume patterning applications

Anja Voigt; Gisela Ahrens; Marina Heinrich; Andrew Thompson; Gabi Gruetzner

doi:10.1117/12.2046258

27 March 2014 Improved adhesion of novolac and epoxy based resists by cationic organic materials on critical substrates for high volume patterning applications

Anja Voigt, Gisela Ahrens, Marina Heinrich, Andrew Thompson, Gabi Gruetzner

Author Affiliations +

Proceedings Volume 9051, Advances in Patterning Materials and Processes XXXI; 90511K (2014) https://doi.org/10.1117/12.2046258
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Microlithography uses a variety of resists and polymer materials to create patterns and lithographic structures on several types of substrates. Excellent adhesion of the resists and polymers to the substrate is a prerequisite for successful patterning and pattern transfer. This paper presents the results of an investigation of the effects of an adhesion promoter, SurPass, on the lithographic process when used in combination with a variety of resists, and substrate materials. SurPass is a waterborne, non-hazardous, cationic organic surface active agent that promotes adhesion by modifying the substrate surface energy without deposition, chemical change or impact on electrical properties of the substrate material. The effectiveness of SurPass in combination with several novolac and epoxy resists on various substrate materials will be presented.

Citation Download Citation

Anja Voigt, Gisela Ahrens, Marina Heinrich, Andrew Thompson, and Gabi Gruetzner "Improved adhesion of novolac and epoxy based resists by cationic organic materials on critical substrates for high volume patterning applications", Proc. SPIE 9051, Advances in Patterning Materials and Processes XXXI, 90511K (27 March 2014); https://doi.org/10.1117/12.2046258

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available