© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
ACCESS THE FULL ARTICLE
Aamod Shanker, Martin Sczyrba, Brid Connolly, Franklin Kalk, Andy Neureuther, Laura Waller, "Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography," Proc. SPIE 9052, Optical Microlithography XXVII, 90521D (31 March 2014);