Rigorous simulation and optimization of the lithography/directed self-assembly co-process

Tim Fühner; Ulrich Welling; Marcus Müller; Andreas Erdmann

doi:10.1117/12.2047381

31 March 2014 Rigorous simulation and optimization of the lithography/directed self-assembly co-process

Tim Fühner, Ulrich Welling, Marcus Müller, Andreas Erdmann

Author Affiliations +

Proceedings Volume 9052, Optical Microlithography XXVII; 90521C (2014) https://doi.org/10.1117/12.2047381
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

We propose a framework for the rigorous simulation of the combined lithography/directed self-assembly (DSA) of block copolymers process. As an example, the rectification of a contact hole through grapho-epitaxy DSA is presented. The proposed modeling strategy, using a full-fledged lithography simulation and a coarse-grained polymer model in conjunction with a particle-based Monte-Carlo simulator, provides direct insight into various aspects of the pattern and defect formation. We accordingly characterize and quantify the combined process performance and its determining factors. Appropriate metrics and representations for the common process windows are derived.

Citation Download Citation

Tim Fühner, Tim Fühner, Ulrich Welling, Ulrich Welling, Marcus Müller, Marcus Müller, Andreas Erdmann, Andreas Erdmann, "Rigorous simulation and optimization of the lithography/directed self-assembly co-process", Proc. SPIE 9052, Optical Microlithography XXVII, 90521C (31 March 2014); doi: 10.1117/12.2047381; https://doi.org/10.1117/12.2047381

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