Estimation of 1D proximity budget impacts due to light source for advanced node design

R. C. Peng; Tony Wu; H. H. Liu

doi:10.1117/12.2047373

31 March 2014 Estimation of 1D proximity budget impacts due to light source for advanced node design

R. C. Peng, Tony Wu, H. H. Liu

Proceedings Volume 9052, Optical Microlithography XXVII; 90521I (2014) https://doi.org/10.1117/12.2047373
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

The laser impacts on the proximity error are well known in many previous studies and papers. The proximity budget control is more and more important for advanced node design. The goal of this paper is to describe the laser spectral bandwidth and wavelength stability contributions to the proximity budget by considering general line/space and trench pattern design. We performed experiments and modeled the photolithography response using Panoramic Technology HyperLith simulation over a range of laser bandwidth and wavelength stability conditions to quantify the long term and short term stability contributions on wafer-to-wafer and field-to-field proximity variation. Finally, we determine the requirements for current system performance to meet patterning requirements and minimize the laser contribution on proximity error and within 4% of target CD Critical Dimension Uniformity (CDU) budget process requirement [2]. This paper also discusses how the wafer lithography drivers are enabled by ArFi light source technologies.

Citation Download Citation

R. C. Peng, Tony Wu, and H. H. Liu "Estimation of 1D proximity budget impacts due to light source for advanced node design", Proc. SPIE 9052, Optical Microlithography XXVII, 90521I (31 March 2014); https://doi.org/10.1117/12.2047373

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available