31 March 2014 Illumination system without scanning slit for lithographic tools
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The step-and-scan lithographic illumination system has a scanning slit which could not only control the exposure field size but also assist the wafer to complete scanning process with high uniformity. The scanning slit is comprised by four blades which are drive by four electric actuators. This paper presents a 193nm lithographic illumination system without utilizing scanning slit. A microlens array, a micromirror array and a collimating lens are used to generated a certain intensity distribution on the surface of the aperture array. A fast scanning mirror is used in to change the position of the formed intensity distribution to change the illuniated area on the mask. That can realize lithographic scanning process without slit.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yunbo Zhang, Yunbo Zhang, Aijun Zeng, Aijun Zeng, Ying Wang, Ying Wang, Mingxing Chen, Mingxing Chen, Shanhua Zhang, Shanhua Zhang, Qiao Yuan, Qiao Yuan, Huijie Huang, Huijie Huang, "Illumination system without scanning slit for lithographic tools", Proc. SPIE 9052, Optical Microlithography XXVII, 90522H (31 March 2014); doi: 10.1117/12.2046303; https://doi.org/10.1117/12.2046303


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