A pattern-driven design regularization methodology

Jason P. Cain; Norma P. Rodriguez; Jason Sweis; Frank E. Gennari; Ya-Chieh Lai

doi:10.1117/12.2047741

28 March 2014 A pattern-driven design regularization methodology

Jason P. Cain, Norma P. Rodriguez, Jason Sweis, Frank E. Gennari, Ya-Chieh Lai

Proceedings Volume 9053, Design-Process-Technology Co-optimization for Manufacturability VIII; 905303 (2014) https://doi.org/10.1117/12.2047741
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Pattern matching tools have become increasingly common in physical design flows for verification and layout analysis. Recently developed topological-based pattern matching engines offer several advantages over conventional three-value logic implementations. In this paper the use of such topological engines is explored for measuring physical design regularity, driving improvements in overall regularity, and for implementing targeted enhancements for suboptimal layout configurations.

Citation Download Citation

Jason P. Cain, Norma P. Rodriguez, Jason Sweis, Frank E. Gennari, and Ya-Chieh Lai "A pattern-driven design regularization methodology", Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 905303 (28 March 2014); https://doi.org/10.1117/12.2047741

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