In situ measurements with CPC micro-actuators using SEM

Friedrich Kaasik; Indrek Must; Enn Lust; Meelis Jürgens; Volker Presser; Andres Punning; Rauno Temmer; Rudolf Kiefer; Alvo Aabloo

doi:10.1117/12.2045136

8 March 2014 In situ measurements with CPC micro-actuators using SEM

Friedrich Kaasik, Indrek Must, Enn Lust, Meelis Jürgens, Volker Presser, Andres Punning, Rauno Temmer, Rudolf Kiefer, Alvo Aabloo

Author Affiliations +

Proceedings Volume 9056, Electroactive Polymer Actuators and Devices (EAPAD) 2014; 90562B (2014) https://doi.org/10.1117/12.2045136
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

Comparative measurements of carbon-polymer composite micro-actuators based on room temperature ionic liquid electrolyte were carried out in situ (1) in vacuum using a state-of-the-art scanning electron microscope, (2) in an oxygen-free atmosphere under ambient pressure, and (3) under ambient environment. The fabricated micro-actuators sustained their actuation performance in all three environments, revealing important implications regarding their humidity-dependence. SEM observations demonstrate high stroke actuation of a device with submillimeter length, which is the typical size range of actuators desirable for medical or lab-on-chip applications.

Citation Download Citation

Friedrich Kaasik, Indrek Must, Enn Lust, Meelis Jürgens, Volker Presser, Andres Punning, Rauno Temmer, Rudolf Kiefer, and Alvo Aabloo "In situ measurements with CPC micro-actuators using SEM", Proc. SPIE 9056, Electroactive Polymer Actuators and Devices (EAPAD) 2014, 90562B (8 March 2014); https://doi.org/10.1117/12.2045136

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