PZT-actuated, 2D optical scanning image acquisition

Kebin Gu; Keng-Ren Lin; Wei-Chih Wang

doi:10.1117/12.2045183

16 April 2014 PZT-actuated, 2D optical scanning image acquisition

Kebin Gu, Keng-Ren Lin, Wei-Chih Wang

Proceedings Volume 9060, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2014; 906018 (2014) https://doi.org/10.1117/12.2045183
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

An image acquisition utilizing a 2D piezoelectric actuated optical scanner is presented. Fabrication and testing of a micromachined optically transmissive cantilever waveguide that operates in the resonant mode is presented with its application as a micro-optical scanner. The optical waveguide has a smaller cross-sectional area (2 µm × 5 µm) than our previous study (62.5 to 420 mm). The scanner is consisted of a single mode optical fiber (SMF28e) mounted on a X-Y coupled piezoelectric bimorphs operating at the actuators’ resonant frequencies of 50 Hz and 128 Hz. The scanner achieves a 3.14 mm vertical and 0.61 mm horizontal tip displacements with a ±10V input.

Citation Download Citation

Kebin Gu, Keng-Ren Lin, and Wei-Chih Wang "PZT-actuated, 2D optical scanning image acquisition", Proc. SPIE 9060, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2014, 906018 (16 April 2014); https://doi.org/10.1117/12.2045183

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