8 March 2014 Very low frequency/high sensitivity triaxial monolithic inertial sensor
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Abstract
This paper describes a new mechanical implementation of a triaxial sensor, configurable as seismometer and/or as accelerometer, consisting of three one-dimensional monolithic FP sensors, suitably geometrically positioned. The triaxial sensor is, therefore, compact, light, scalable, tunable instrument (frequency < 100mHz), with large band (10−7 Hz − 10Hz), high quality factor (Q > 2500 in air) with good immunity to environmental noises, guaranteed by an integrated laser optical readout. The measured sensitivity curve is in very good agreement with the theoretical ones (10−12m/√Hz) in the band (0.1 ÷ 10Hz). Typical applications are in the field of earthquake engineering, geophysics, civil engineering and in all applications requiring large band-low frequency performances coupled with high sensitivities.
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F. Acernese, R. De Rosa, G. Giordano, R. Romano, F. Barone, "Very low frequency/high sensitivity triaxial monolithic inertial sensor", Proc. SPIE 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014, 90612H (8 March 2014); doi: 10.1117/12.2043595; https://doi.org/10.1117/12.2043595
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