Paper
17 December 2013 Moire effects arising on mechanical treatment of single crystal surface
Mykola Raransky, Vitaliy Balazyuk, Mykola Melnyk, Olga Kniginitska, Mykhailo Gunko
Author Affiliations +
Proceedings Volume 9066, Eleventh International Conference on Correlation Optics; 90661C (2013) https://doi.org/10.1117/12.2053248
Event: Eleventh International Conference on Correlation Optics, 2013, Chernivsti, Ukraine
Abstract
X-ray diffraction moiré methods in the geometry of L-L-L Laue diffraction have been used to determine crystal structure defects arising in the near-surface Si layers on mechanical treatment (cutting with diamond disc and grinding). A model of damaged layer has been proposed and zone dimensions have been determined, namely polycrystalline structure, microcracks, dislocation assemblies and packing defects, crystal elastic strain.
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Mykola Raransky, Vitaliy Balazyuk, Mykola Melnyk, Olga Kniginitska, and Mykhailo Gunko "Moire effects arising on mechanical treatment of single crystal surface", Proc. SPIE 9066, Eleventh International Conference on Correlation Optics, 90661C (17 December 2013); https://doi.org/10.1117/12.2053248
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KEYWORDS
Crystals

Single crystal X-ray diffraction

Abrasives

Moire patterns

Silicon

Diffraction

Surface finishing

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