The optical thin film parts are important components used in the laser systems. In practice, the electromagnetic field generated by the laser will make complex and diverse changes on the films, but the fundamental related with properties changing is not clear. For the purpose of recognizing the variation of TiO2 films irradiated by the laser, TiO2 films were prepared on K9 substrates at the same experimental conditions with the exception that the irradiating laser energy was different to investigate effects about the film’s properties and morphology between the before and after irradiation. The following film’s factors: transmittance, refractive index, extinction coefficient, film thickness and laser-induced damage threshold (LIDT) are included in experimental results, also, morphology and roughness by an Atomic Force Microscope (AFM) and a Taylor Surf CCI 2000 non-contact instrument are needed. The result showed that irradiating laser can decrease TiO2 films’ transmittance and roughness, and increases the films’ refractive index and LIDT. Furthermore, the results indicated that different laser energy cause the different morphology of films.