16 December 2013 Effects of substrate temperature on morphology, structure and chemical composition of Cu2S films
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Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90680L (2013) https://doi.org/10.1117/12.2054098
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China
Abstract
Cu2S thin films have been deposited on CdS/ITO (In2O3:Sn) substrates with various substrate temperatures by DC magnetron sputtering method. The effects of substrate temperature on the crystallization behavior and morphology are studied. Chemical composition of the films is confirmed by energy dispersive X-ray (EDX) spectroscopy. X-ray diffraction (XRD) analysis of the films reveals they have polycrystalline chalcocite structure with (110) texture. Field emission scanning electron microscopy (FESEM) show the crystalline nature of the films at higher substrate temperature, which is in accordance with XRD measurements. Stoichiometric analysis exhibits element composition with Cu/S concentrations ratio equal to 2 approximately.
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Bing Ren, Bing Ren, Jian Huang, Jian Huang, Lin Wang, Lin Wang, Ke Tang, Ke Tang, Kaifeng Qin, Kaifeng Qin, Zhangmin Pan, Zhangmin Pan, Linjun Wang, Linjun Wang, Yiben Xia, Yiben Xia, } "Effects of substrate temperature on morphology, structure and chemical composition of Cu2S films", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680L (16 December 2013); doi: 10.1117/12.2054098; https://doi.org/10.1117/12.2054098
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