Structural characterization of multilayer using the analysis combining GIXRF with GIXRR method

Xiaoyue Yang; Wenbin Li; Jingtao Zhu; Xiaolong Li; Zhanshan Wang

doi:10.1117/12.2053960

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16 December 2013 Structural characterization of multilayer using the analysis combining GIXRF with GIXRR method

Xiaoyue Yang, Wenbin Li, Jingtao Zhu, Xiaolong Li, Zhanshan Wang

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Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90680X (2013) https://doi.org/10.1117/12.2053960
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Grazing incidence X-ray reflectivity (GIXRR) and X-ray fluorescence (GIXRF) are complementary techniques for the characterization of layered materials. It is shown that the analysis of multilayers by this combined technique can overcome the deficiencies of individual techniques. In this study, Si(sub)/W/Ni/Ti/Ni was studied using grazing incidence X-ray reflectivity and X-ray fluorescence. It is suggested that the geometrical factor correction in GIXRF analysis can be avoided by using the intensity ratio of the fluorescence yields from Ni-Kα and Ti-Kα. Additionally, the fluorescence intensity of Ni-Kα, Ti-Kα, Si-Kα and the elastic scattering are analyzed quantitatively with the corresponding GIXRR profile to obtain reliable structural parameters about the sample.

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Xiaoyue Yang, Wenbin Li, Jingtao Zhu, Xiaolong Li, and Zhanshan Wang "Structural characterization of multilayer using the analysis combining GIXRF with GIXRR method", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680X (16 December 2013); https://doi.org/10.1117/12.2053960

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