16 December 2013 Fabrication and performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 thin films
Author Affiliations +
Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90681K (2013) https://doi.org/10.1117/12.2051725
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China
Abstract
Mn-Co-Ni-O bolometer with spinel structure has been extensively studied as a low resistivity and high sensitivity negative temperature coefficient material for decades. In this paper, the fabrication process and the performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 (MCNO) thin films grown on Al2O3 substrate by chemical solution deposition were investigated. The MCNO bolometer sized 300×160 μm2 were fabricated by photolithography process followed by wet etching, and the temperature coefficient of resistance reaches -3.81 %K-1 @296 K. Relatively low excess noise was achieved due to the good quality of fabrication process, and the normalized noise power γ/n was found to be 1.8×10-21 cm3 at 296 K. Through black coating the performances for MCNO bolometer, operating at room temperature, are greatly improved and exhibit responsivity of over 354 V/W, detectivity of approximated 4.5×107 cmHz1/2/W@10Hz at ±16 V, and the thermal time constant of about 18 ms. These experiment results indicate that the infrared detection ability of MCNO thin film bolometer is significantly enhanced comparing with bulk devices.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ouyang Cheng, Wei Zhou, Jing Wu, Junhao Chu, Zhiming Huang, "Fabrication and performance of uncooled infrared bolometer based on Mn1.56Co0.96Ni0.48O4 thin films", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90681K (16 December 2013); doi: 10.1117/12.2051725; https://doi.org/10.1117/12.2051725
PROCEEDINGS
6 PAGES


SHARE
Back to Top