24 June 2014 Dark current measurement of Type-II superlattice infrared focal plane array detector
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Abstract
We report the result of a dark current measurement of a Type-II superlattice (T2SL) infrared focal plane array (FPA), which consists of a 6 μm cutoff T2SL detector array and the readout integration circuit (ROIC) ISC0903 of FLIR Systems. In order to measure the dark current of the FPA, we obtained images with different exposure times in a fully closed cold shield of 77 K. Using the temporal change rate of the output and considering the charge conversion efficiency of the ROIC, we obtained a dark current density with an average value of 4 × 10-5 A/cm2 at a bias of -100 mV. We also compare the result of the FPA dark current measurement with that of a test element group (TEG), which was a single pixel detector, fabricated by the same process as the FPA. The dark current density of the TEG was 3 × 10-6 A/cm2 at a bias of -100 mV, lower than that of the FPA. We discuss the discrepancy between the dark current densities of the FPA and the TEG.
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Michito Sakai, Michito Sakai, Haruyoshi Katayama, Haruyoshi Katayama, Junpei Murooka, Junpei Murooka, Masafumi Kimata, Masafumi Kimata, Yasuhiro Iguchi, Yasuhiro Iguchi, } "Dark current measurement of Type-II superlattice infrared focal plane array detector", Proc. SPIE 9070, Infrared Technology and Applications XL, 907015 (24 June 2014); doi: 10.1117/12.2050299; https://doi.org/10.1117/12.2050299
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