4 June 2014 High-performance flexible microwave passives on plastic
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We report the demonstration of bendable inductors, capacitors and switches fabricated on a polyethylene terephthalate (PET) substrate that can operate at high microwave frequencies. By employing bendable dielectric and single crystalline semiconductor materials, spiral inductors and metal-insulator-metal (MIM) capacitors with high quality factors and high resonance frequencies and single-pole, single-throw (SPST) switches were archived. The effects of mechanical bending on the performance of inductors, capacitors and switches were also measured and analyzed. We further investigated the highest possible resonance frequencies and quality factors of inductors and capacitors and, high frequency responses and insertion loss. These demonstrations will lead to flexible radio-frequency and microwave systems in the future.
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Zhenqiang Ma, Zhenqiang Ma, Jung-Hun Seo, Jung-Hun Seo, Sang June Cho, Sang June Cho, Weidong Zhou, Weidong Zhou, "High-performance flexible microwave passives on plastic", Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90831I (4 June 2014); doi: 10.1117/12.2051700; https://doi.org/10.1117/12.2051700

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