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25 June 2014 Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures
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Abstract
Multilevel controllable nanoimprint driven molecular orientation has been obtained in thin films of block copolymer polystyrene-b-polyethylene oxide( PS-b-PEO) by means of solvent vapours assisted nanoimprint lithography (SAIL). The NIL setup using solvent vapours was capable of imprinting nanoscale features over a large area and simultaneously annealing PS-b-PEO thin films. A line pattern stamp was replicated in the BCP film in over a large area with a high resolution registry, and was also observed that the PS-b-PEO film exhibited microphase segregation in the residual layer exhibits a nanodot array from showing hexagonally packed PEO dots in the PS matrix, with a diameter of 20 nm with 40 nm pitch. The order of the hexagonally arranged nanodot lattice seen in the nanodots array was quantified from SEM images using by the opposite partner method from SEM images analysis and compared with to conventionally solvent annealed BCP films, demonstrating an improvement of the ordering of up to 50%. Grazing-incidence small-angle X-ray scattering (GISAXS) study demonstrates the excellent fidelity of the pattern transfer and confirms the periodicity of the BCP in the mesas. In addition, applying the SAIL methodology to BCP thin films in nanopatterned silsequioxane substrates, it was possible to obtain multilevel structures decorated with the BCP microphase segregation. The SAIL technique is a versatile and robust platform to obtain complex high density periodic nanostructures, particularly for second generation block copolymers directed self-assembly.
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C Simão, W. Khunsin, N. Kehagias, A. Francone, M. Zelsmann, M. A. Morris, and C. M. Sotomayor Torres "Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures", Proc. SPIE 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI, 90832S (25 June 2014); https://doi.org/10.1117/12.2050181
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