28 May 2014 Progress in the specification of optical instruments for the measurement of surface form and texture
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Abstract
Specifications for confocal microscopes, optical interferometers and other methods of measuring areal surface topography can be confusing and misleading. The emerging ISO 25178 standards, together with the established international vocabulary of metrology, provide a foundation for improved specifications for 3D surface metrology instrumentation. The approach in this paper links instrument specifications to metrological characteristics that can influence a measurement, using consistent definitions of terms, and reference to verification procedures.
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Peter J. de Groot, Peter J. de Groot, } "Progress in the specification of optical instruments for the measurement of surface form and texture", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100M (28 May 2014); doi: 10.1117/12.2054435; https://doi.org/10.1117/12.2054435
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