Development and characterization of a new silicone/platine based 2-DoF sensorized end-effector for micromanipulators

Xin Xu; Joël Agnus; Micky Rakotondrabe

doi:10.1117/12.2049041

4 June 2014 Development and characterization of a new silicone/platine based 2-DoF sensorized end-effector for micromanipulators

Xin Xu, Joël Agnus, Micky Rakotondrabe

Author Affiliations +

Proceedings Volume 9116, Next-Generation Robots and Systems; 911608 (2014) https://doi.org/10.1117/12.2049041
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

This paper reports the development and the characterization of a new silicone end-effector with integrated sensor based on a set of platine piezoresistive gage. Used as interface between a micromanipulator or actuator and a manipulated small object, the features of the end-effector are: 1) its compactness (length between 750μm and 2mm, width=40μm, thickness=25μm), 2) the fully integrated force measurement system thanks to microfabricated platine piezoresistive gage, 3) the 2-dof (degrees of freedom: along y and z axis) measurement capability, 4) the high sensitivity of measurment provided for each axis (0.6% to 0.8% for the range of measured force of 1mN), 4) and the relatively high gauge factor (G=6). This paper reports the principle, the development, the microfabrication and the characterization of the 2-dof sensorized end-effector.

Citation Download Citation

Xin Xu, Joël Agnus, and Micky Rakotondrabe "Development and characterization of a new silicone/platine based 2-DoF sensorized end-effector for micromanipulators", Proc. SPIE 9116, Next-Generation Robots and Systems, 911608 (4 June 2014); https://doi.org/10.1117/12.2049041

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available