2 May 2014 3D optimization of a polymer MOEMS for active focusing of VCSEL beam
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We report on the optimized design of a polymer-based actuator that can be directly integrated on a VCSEL for vertical beam scanning. Its operation principle is based on the vertical displacement of a SU-8 membrane including a polymer microlens. Under an applied thermal gradient, the membrane is shifted vertically due to thermal expansion in the actuation arms induced by Joule effect. This leads to a modification of microlens position and thus to a vertical scan of the laser beam. Membrane vertical displacements as high as 8μm for only 3V applied were recently experimentally obtained. To explain these performances, we developed a comprehensive tri-dimensional thermo-mechanical model that takes into account SU-8 material properties and precise MOEMS geometry. Out-of-plane mechanical coefficients and thermal conductivity were thus integrated in our 3D model (COMSOL Multiphysics). Vertical displacements extracted from these data for different actuation powers were successfully compared to experimental values, validating this modelling tool. Thereby, it was exploited to increase MOEMS electrothermal performance by a factor higher than 5.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Abada, S. Abada, T. Camps, T. Camps, B. Reig, B. Reig, JB Doucet, JB Doucet, E. Daran, E. Daran, V. Bardinal, V. Bardinal, "3D optimization of a polymer MOEMS for active focusing of VCSEL beam", Proc. SPIE 9130, Micro-Optics 2014, 913003 (2 May 2014); doi: 10.1117/12.2052482; https://doi.org/10.1117/12.2052482

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