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29 May 2014 Front Matter: Volume 9132
This PDF file contains the front matter associated with SPIE Proceedings Volume 9132 including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from this book:

Author(s), “Title of Paper,” in Optical Micro- and Nanometrology V, edited by Christophe Gorecki, Anand Krishna Asundi, Wolfgang Osten, Proceedings of SPIE Vol. 9132 (SPIE, Bellingham, WA, 2014) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628410808

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Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print and on CD-ROM. Papers are published as they are submitted and meet publication criteria. A unique, consistent, permanent citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:

  • The first four digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc.

The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. Numbers in the index correspond to the last two digits of the six-digit CID Number.

Conference Committee

Symposium Chairs

  • Francis Berghmans, Vrije Universiteit Brussel (Belgium)

  • Ronan Burgess, European Commission (Belgium)

  • Jürgen Popp, Institut für Photonische Technologien e.V. (Germany)

  • Peter Hartmann, SCHOTT AG (Germany)

Honorary Symposium Chair

  • Hugo Thienpont, Vrije Universiteit Brussel (Belgium)

Conference Chairs

  • Christophe Gorecki, FEMTO-ST (France)

  • Anand Krishna Asundi, Nanyang Technological University (Singapore)

  • Wolfgang Osten, Institut für Technische Optik (Germany)

Conference Programme Committee

  • Karsten Buse, Fraunhofer-Institut für Physikalische Messtechnik (Germany)

  • Jürgen W. Czarske, Technische Universität Dresden (Germany)

  • Peter J. de Groot, Zygo Corporation (United States)

  • Pietro Ferraro, Istituto Nazionale di Ottica (Italy)

  • Cosme Furlong, Worcester Polytechnic Institute (United States)

  • Joby Joseph, Indian Institute of Technology Delhi (India)

  • Malgorzata Kujawinska, Warsaw University of Technology (Poland)

  • Peter H. Lehmann, Universität Kassel (Germany)

  • Yukitoshi Otani, Utsunomiya University (Japan)

  • Heidi Ottevaere, Vrije Universiteit Brussel (Belgium)

  • Nicolas Passilly, FEMTO-ST (France)

  • Christof Pruss, Universität Stuttgart (Germany)

  • Xiaocong Yuan, Nankai University (China)

Session Chairs

  • 1 Profilometry and Surface Measurement

    Wolfgang Osten, Institut für Technische Optik (Germany)

  • 2 Scatterometry

    Malgorzata Kujawinska, Warsaw University of Technology (Poland)

  • 3 Nanoscale Metrology

    Pietro Ferraro, Istituto Nazionale di Ottica (Italy)

  • 4 Traceability and Sensitivity Enhancement

    Christophe Gorecki, FEMTO-ST (France)

  • 5 Optical Microscopy and Tomography

    Anand Krishna Asundi, Nanyang Technological University (Singapore)

  • 6 Phase Reconstruction

    Nicolas Passilly, FEMTO-ST (France)

  • 7 Optical Surface and Volume Metrology

    Holger Knell, Universität Kassel (Germany)

  • 8 New Interferometric Techniques

    Jürgen W. Czarske, Technische Universität Dresden (Germany)


Survival in the highly competitive process industries is largely dependent on the optimisation of product performance, component quality control, and the production of high-quality economic parts. With increased competition in the present economic climate, investigations into new advanced techniques to improve product quality and cost reduction are essential. In addition, over the recent years, micro-components as part of micro-manufacturing processes are becoming increasingly relevant. Such micro components/systems are key in improving the capabilities and performances of next generation products. However, compared to manufacturing processes at the micro- and nano-meter level, the ability to control, measure and characterise such dimensional features in 3D needs to be further developed. Optical micro- and nano-metrology are key technologies that need proper consideration to address the issue. Associated research focuses on the design, development and evaluation at nanometer scales of both specific procedures and instrumentation to leverage research aspects as well as improve the mass production of micro-and nano-manufacturing products.

This volume contains the proceeding of the sixth conference on Optical Micro- and Nanometrology, Photonics Europe, dedicated to optical inspection methods and developments in nano- and micro-measurements. (The volume is titled, “Optical Micro- and Nonometrology V” due to an earlier title change.) The conference contains 8 oral sessions and one poster session on Micro- and nanometrology, including Profilometry and Surface Measurement, Scatterometry, Nanoscale Metrology, Traceability and Sensitivity Enhancement, Optical Microscopy and Tomography, Phase Reconstruction, Optical Surface and Volume Metrology and New Interferometric Techniques sessions.

We would like to thank the members of scientific program committee for their fine efforts. Finally, we thank the authors for their excellent contributions and the SPIE staff for their support of this conference.

Christophe Gorecki

Wolfgang Osten

Anand Krishna Asundi

© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 9132", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913201 (29 May 2014);

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