1 May 2014 Interferometric sensors based on sinusoidal optical path length modulation
Author Affiliations +
Sinusoidal optical path length modulation of the reference or the measurement arm of an interferometer is a technique which is a fast alternative to white light or phase shifting interferometry. In this paper three different sensors using this periodical modulation are presented. In addition, signal processing algorithms based on Discrete Fourier Transform, Hilbert Transform and parameter estimation are analyzed. These algorithms are used to obtain measurement results which demonstrate the capabilities of the presented interferometric sensors.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Holger Knell, Holger Knell, Markus Schake, Markus Schake, Markus Schulz, Markus Schulz, Peter Lehmann, Peter Lehmann, "Interferometric sensors based on sinusoidal optical path length modulation", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91320I (1 May 2014); doi: 10.1117/12.2051508; https://doi.org/10.1117/12.2051508

Back to Top