Displacement measurement with intracavity interferometry

Josef Lazar; Miroslava Holá; Antonín Fejfar; Jiří Stuchlík; Jan Kočka; Jindřich Oulehla; Ondřej Číp

doi:10.1117/12.2052923

1 May 2014 Displacement measurement with intracavity interferometry

Josef Lazar, Miroslava Holá, Antonín Fejfar, Jiří Stuchlík, Jan Kočka, Jindřich Oulehla, Ondřej Číp

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 913210 (2014) https://doi.org/10.1117/12.2052923
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

We present a measuring technique for displacement and position sensing over a limited range with detection of standingwave pattern inside of a passive Fabry-Perot cavity. The concept considers locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows to stabilize wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneities. Sensing of the interference maxima and minima within the cavity along the beam axis has been tested and proven with a low loss photoresistive photodetector based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.

Citation Download Citation

Josef Lazar, Miroslava Holá, Antonín Fejfar, Jiří Stuchlík, Jan Kočka, Jindřich Oulehla, and Ondřej Číp "Displacement measurement with intracavity interferometry", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913210 (1 May 2014); https://doi.org/10.1117/12.2052923

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