A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI)

Tobias Boettcher; Marc Gronle; Florian Mauch; Wolfgang Osten

doi:10.1117/12.2054624

1 May 2014 A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI)

Tobias Boettcher, Marc Gronle, Florian Mauch, Wolfgang Osten

Author Affiliations +

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 913211 (2014) https://doi.org/10.1117/12.2054624
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Derived from Spectral Interferometry, a line sensor named Laterally Chromatically Dispersed, Spectrally Encoded Interferometer has been developed lately. The basic setup features a single SLD in the near infra-red range, whose light is laterally spread over a measurement line of about 1mm by a diffraction grating. The signal encodes the lateral position as well as the respective optical path difference for every pixel on the spectrometer. Thus, an elaborated evaluation strategy is needed for precise measurement, including the need for a priori knowledge of the surface or multiple related measurements. To overcome this limitation and provide a real single-shot measurement, the setup can be extended by a second light source. However, the sources have to meet some strong requirements, such as sufficient spectral separation. Sensor simulations for different classes of objects show, that an accurate reconstruction of many surfaces can be achieved with the extended setup in a real single-shot line measurement without the need for a priori information.

Citation Download Citation

Tobias Boettcher, Marc Gronle, Florian Mauch, and Wolfgang Osten "A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI)", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913211 (1 May 2014); https://doi.org/10.1117/12.2054624

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