1 May 2014 Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board
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Abstract
In this study, we proposed and fabricated optical sensor module integrated onto optical-electrical printed circuit board (PCB) for gas detection based on polymer waveguide with tin oxide thin film. Their potential application as gas sensors are confirmed through computational simulation using the two dimensional finite-difference time-domain method (2DFDTD). Optical-electrical PCB was integrated into vertical cavity surface emitting laser (VCSEL), photodiode and polymeric sensing device was fabricated by the nano-imprint lithography technique. SnO2 thin film of 100nm thickness was placed on the surface of core layer exposed by removing the specific area of the upper cladding layer of 300 μm length and 50 μm width. The performance of the device was measured experimentally. Initial study on the sensor performance for carbon monoxide gas detection indicated good sensitivity.
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Jung Woon Lim, Jung Woon Lim, Seon Hoon Kim, Seon Hoon Kim, Jong-Sup Kim, Jong-Sup Kim, Jeong Ho Kim, Jeong Ho Kim, Yune Hyoun Kim, Yune Hyoun Kim, Ju Young Lim, Ju Young Lim, Young-Eun Im, Young-Eun Im, Jong Bok Park, Jong Bok Park, Swook Hann, Swook Hann, } "Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913215 (1 May 2014); doi: 10.1117/12.2049681; https://doi.org/10.1117/12.2049681
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