Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field

A. Leong-Hoï; B. Serio; P. Twardowski; P. Montgomery

doi:10.1117/12.2051833

1 May 2014 Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field

A. Leong-Hoï, B. Serio, P. Twardowski, P. Montgomery

Author Affiliations +

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 913219 (2014) https://doi.org/10.1117/12.2051833
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Based on a miniature digital light projector (pico-DLP), a prototype of a Structured Illumination Microscope (SIM) has been developed. The pico-DLP is used to project fringes onto a sample and applying the three-step phase shifting algorithm together with the absolute phase retrieval method, the 3D shape of the object surface is extracted. By using a specific optical system instead of a conventional microscope objective, the device allows 3D reconstructions of surfaces with both a 10× magnification and a high depth of field obtained thanks to a small numerical aperture of 0.06 offering an acceptable lateral resolution of 6.2 μm. An image processing algorithm has been developed to reduce the noise in the acquired images before applying the reconstruction algorithm and so optimize the reconstruction method. Compared with interference microscopy and confocal microscopy that have a shallower depth of field per XY image, the microscope developed achieves a depth of field about 700 μm and requires no vertical scanning, which greatly reduces the acquisition time. Although the system at this stage does not have the same resolution performance as interference microscopy, it is nonetheless faster and cheaper. One possible application of this SIM technique would be to first reconstruct in real-time parts of an object before performing higher resolution 3D measurements with interference microscopy. As with all classical optical instruments, the lateral resolution is limited by diffraction. Work is being carried out with the prototype SIM system to be able to exceed the lateral resolution limits and thus achieve super resolution.

Citation Download Citation

A. Leong-Hoï, B. Serio, P. Twardowski, and P. Montgomery "Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913219 (1 May 2014); https://doi.org/10.1117/12.2051833

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