Microfabrication of transparent materials using filamented femtosecond laser beams

S. Butkus; D. Paipulas; Eugenijus Gaižauskas; D. Kaškelytė; V. Sirutkaitis

doi:10.1117/12.2051160

1 May 2014 Microfabrication of transparent materials using filamented femtosecond laser beams

S. Butkus, D. Paipulas, Eugenijus Gaižauskas, D. Kaškelytė, V. Sirutkaitis

Proceedings Volume 9135, Laser Sources and Applications II; 91351E (2014) https://doi.org/10.1117/12.2051160
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Glass drilling realized with the help of femtosecond lasers attract industrial attention, however, desired tasks may require systems employing high numerical aperture (NA) focusing conditions, low repetition rate lasers and complex fast motion translation stages. Due to the sensitivity of such systems, slight instabilities in parameter values can lead to crack formations, severe fabrication rate decrement and poor quality overall results. A microfabrication system lacking the stated disadvantages was constructed and demonstrated in this report. An f-theta lens was used in combination with a galvanometric scanner, in addition, a water pumping system that enables formation of water films of variable thickness in real time on the samples. Water acts as a medium for filament formation, which in turn decreases the focal spot diameter and increases fluence and axial focal length. This article demonstrates the application of a femtosecond (280fs) laser towards rapid cutting of different transparent materials. Filament formation in water gives rise to strong ablation at the surface of the sample, moreover, the water, surrounding the ablated area, adds increased cooling and protection from cracking. The constructed microfabrication system is capable of drilling holes in thick soda-lime, hardened glasses and sapphire. The fabrication time varies depending on the diameter of the hole and spans from a few to several hundred seconds. Moreover, complex-shape fabrication was demonstrated.

Citation Download Citation

S. Butkus, D. Paipulas, Eugenijus Gaižauskas, D. Kaškelytė, and V. Sirutkaitis "Microfabrication of transparent materials using filamented femtosecond laser beams", Proc. SPIE 9135, Laser Sources and Applications II, 91351E (1 May 2014); https://doi.org/10.1117/12.2051160

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KEYWORDS

Glasses

Femtosecond phenomena

Microfabrication

Laser cutting

Laser drilling

Laser ablation

Pulsed laser operation

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