Laser interfering profilometer for micro-ball whole surface measurement

Bing-hui Lu; Jian-long Zhang; Bing-guo Liu; He-yi Sun; Guo-dong Liu

doi:10.1117/12.2054078

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21 February 2014 Laser interfering profilometer for micro-ball whole surface measurement

Bing-hui Lu, Jian-long Zhang, Bing-guo Liu, He-yi Sun, Guo-dong Liu

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Proceedings Volume 9142, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics: Optical Imaging, Remote Sensing, and Laser-Matter Interaction 2013; 91420A (2014) https://doi.org/10.1117/12.2054078
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held July-December 2013, 2013, SuZhou, China

Abstract

In order to get the precise whole surface feature of micro-ball efficiently without missing points, a laser interfering measurement system and method is developed. Based on the principle of phase-shifting diffraction interference with short- coherence light source, a wave-separation interfering light path is designed, which contains single mode fiber for filtration and pin-hole reflector for diffraction. An accessory system is also projected to complete the whole micro-ball surface scanning, including negative pressure adsorption stage-group with five degree of freedom moving for micro-ball support, overturning stages, and vision monitoring mechanism. A technological process for whole surface measurement is also given. The experiment result shows that, in the case of testing light focusing on the centre of sphere, surface topographic characteristics of micro-ball can be shown clearly and directly by the distribution of interference pattern.

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Bing-hui Lu, Jian-long Zhang, Bing-guo Liu, He-yi Sun, and Guo-dong Liu "Laser interfering profilometer for micro-ball whole surface measurement", Proc. SPIE 9142, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics: Optical Imaging, Remote Sensing, and Laser-Matter Interaction 2013, 91420A (21 February 2014); https://doi.org/10.1117/12.2054078

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