7 August 2014 Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etching
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Abstract
The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm).
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Pontus Forsberg, Pontus Forsberg, Ernesto Vargas, Ernesto Vargas, Christian Delacroix, Christian Delacroix, Olivier Absil, Olivier Absil, Brunella Carlomagno, Brunella Carlomagno, Dimitri Mawet, Dimitri Mawet, Serge Habraken, Serge Habraken, Jean Surdej, Jean Surdej, Mikael Karlsson, Mikael Karlsson, } "Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etching", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915119 (7 August 2014); doi: 10.1117/12.2055475; https://doi.org/10.1117/12.2055475
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