28 July 2014 Metrology system for the calibration of multi-dof mechanisms
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Abstract
This paper presents a novel absolute position metrology system developed in our institute based on a concept using industrial vision by which USB cameras observe targets provided with special dots patterns. The system was originally devised for precision 2D measurements, then extended to 6-degree-of-freedom setups. This particular metrology system has been developed for testing and calibrating the precision hexapods aligning the secondary mirrors of the ESO VLTI auxiliary telescopes but its principle can be used for measuring the accuracy of any multi-degree-of-freedom mechanisms. The accuracy/resolution of the metrology system is typically 2-5 μm along linear degrees of freedom, respectively 5 arcsec for tip-tilt. This method is particularly affordable in cost, robust, yet accurate enough for most precision measurements in astronomical optomechanics.
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Lorenzo Zago, Lorenzo Zago, Mirsad Sarajlic, Mirsad Sarajlic, Fabien Chevalley, Fabien Chevalley, } "Metrology system for the calibration of multi-dof mechanisms", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91513V (28 July 2014); doi: 10.1117/12.2057673; https://doi.org/10.1117/12.2057673
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