Paper
23 July 2014 Kilopixel backshort-under-grid arrays for the Primordial Inflation Polarization Explorer
Christine A. Jhabvala, Dominic J. Benford, Regis P. Brekosky, Meng-Ping Chang, Nicholas P. Costen, Aaron M. Datesman, Gene C. Hilton, Kent D. Irwin, Alan J. Kogut, Justin Lazear, Edward S. Leong, Stephen F. Maher, Timothy M. Miller, S. H. Moseley, Elmer H. Sharp, Johannes G. Staguhn, Edward J. Wollack
Author Affiliations +
Abstract
We have demonstrated a kilopixel, filled, infrared bolometer array for the balloon-borne Primordial Inflation Polarization Explorer (PIPER). The array consists of three individual components assembled into a single working unit: 1) a transition-edge-sensor bolometer array with background-limited sensitivity, 2) a quarter–wavelength backshort grid, and 3) an integrated Superconducting Quantum Interference Device (SQUID) multiplexer (MUX) readout. The detector array is a filled, square–grid of suspended, one-micron thick silicon bolometers with superconducting sensors. The Backshort–Under–Grid (BUG) is a separately fabricated component serving as a backshort to each pixel in the array. The backshorts are positioned in the cavities created behind each detector by the back–etched well. The spacing of the backshort beneath the detector grid can be set from ~30-300_microns by independently adjusting process parameters during fabrication. Kilopixel arrays are directly indium–bump–bonded to a 32x40 SQUID multiplexer circuit. The array architecture is suitable for a wide range of wavelengths and applications. Detector design specific to the PIPER instrument, fabrication overview, and assembly technologies will be discussed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christine A. Jhabvala, Dominic J. Benford, Regis P. Brekosky, Meng-Ping Chang, Nicholas P. Costen, Aaron M. Datesman, Gene C. Hilton, Kent D. Irwin, Alan J. Kogut, Justin Lazear, Edward S. Leong, Stephen F. Maher, Timothy M. Miller, S. H. Moseley, Elmer H. Sharp, Johannes G. Staguhn, and Edward J. Wollack "Kilopixel backshort-under-grid arrays for the Primordial Inflation Polarization Explorer", Proc. SPIE 9153, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VII, 91533C (23 July 2014); https://doi.org/10.1117/12.2056995
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CITATIONS
Cited by 11 scholarly publications.
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KEYWORDS
Sensors

Semiconducting wafers

Multiplexers

Gold

Etching

Superconductors

Silicon

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