Optical fiber refractometer based on silicon nitride nano-overlay deposited with PECVD method

Bartosz Michalak; Mateusz Śmietana; Marcin Koba

doi:10.1117/12.2059681

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2 June 2014 Optical fiber refractometer based on silicon nitride nano-overlay deposited with PECVD method

Bartosz Michalak, Mateusz Śmietana, Marcin Koba

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Proceedings Volume 9157, 23rd International Conference on Optical Fibre Sensors; 91575A (2014) https://doi.org/10.1117/12.2059681
Event: OFS2014 23rd International Conference on Optical Fiber Sensors, 2014, Santander, Spain

Abstract

This work presents an application of polymer-clad silica (PCS) multimode optical fiber coated with high refractive index (n_D>2.4) silicon nitride (SiN_x) nano-overlay for refractive index (RI) sensing. The nano-overlay was deposited on 2.5 mm-long section of the fiber’s core using radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD) method. We show that spectral response of the sensor to external RI strongly depends on the overlay deposition time. For just 6 min-long process the sensitivity calculated as a shift of the resonance observed in the transmission spectrum at about λ=600 nm with RI reaches 690 nm/RIU. The experimental results have been compared to numerical simulations.

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Bartosz Michalak, Mateusz Śmietana, and Marcin Koba "Optical fiber refractometer based on silicon nitride nano-overlay deposited with PECVD method", Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 91575A (2 June 2014); https://doi.org/10.1117/12.2059681

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