2 June 2014 Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing
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Proceedings Volume 9157, 23rd International Conference on Optical Fibre Sensors; 91577T (2014) https://doi.org/10.1117/12.2059175
Event: OFS2014 23rd International Conference on Optical Fiber Sensors, 2014, Santander, Spain
Abstract
A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Pérot cavities in microwires. Both simple cavities and cantilevers are created on 15 μm-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz – 40 kHz.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ricardo M. Andre, Ricardo M. Andre, Simon Pevec, Simon Pevec, Martin Becker, Martin Becker, Jan Dellith, Jan Dellith, Manfred Rothhardt, Manfred Rothhardt, Manuel B. Marques, Manuel B. Marques, Denis Donlagic, Denis Donlagic, Hartmut Bartelt, Hartmut Bartelt, Orlando Frazão, Orlando Frazão, } "Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing", Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 91577T (2 June 2014); doi: 10.1117/12.2059175; https://doi.org/10.1117/12.2059175
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