10 September 2014 Wafer-scale aluminum nano-plasmonics
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Abstract
The design, characterization, and optical modeling of aluminum nano-hole arrays are discussed for potential applications in surface plasmon resonance (SPR) sensing, surface-enhanced Raman scattering (SERS), and surface-enhanced fluorescence spectroscopy (SEFS). In addition, recently-commercialized work on narrow-band, cloaked wire grid polarizers composed of nano-stacked metal and dielectric layers patterned over 200 mm diameter wafers for projection display applications is reviewed. The stacked sub-wavelength nanowire grid results in a narrow-band reduction in reflectance by 1-2 orders of magnitude, which can be tuned throughout the visible spectrum for stray light control.
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Matthew C. George, Matthew C. George, Stew Nielson, Stew Nielson, Rumyana Petrova, Rumyana Petrova, James Frasier, James Frasier, Eric Gardner, Eric Gardner, } "Wafer-scale aluminum nano-plasmonics", Proc. SPIE 9163, Plasmonics: Metallic Nanostructures and Their Optical Properties XII, 91633B (10 September 2014); doi: 10.1117/12.2062633; https://doi.org/10.1117/12.2062633
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