10 September 2014 Wafer-scale aluminum nano-plasmonics
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The design, characterization, and optical modeling of aluminum nano-hole arrays are discussed for potential applications in surface plasmon resonance (SPR) sensing, surface-enhanced Raman scattering (SERS), and surface-enhanced fluorescence spectroscopy (SEFS). In addition, recently-commercialized work on narrow-band, cloaked wire grid polarizers composed of nano-stacked metal and dielectric layers patterned over 200 mm diameter wafers for projection display applications is reviewed. The stacked sub-wavelength nanowire grid results in a narrow-band reduction in reflectance by 1-2 orders of magnitude, which can be tuned throughout the visible spectrum for stray light control.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew C. George, Matthew C. George, Stew Nielson, Stew Nielson, Rumyana Petrova, Rumyana Petrova, James Frasier, James Frasier, Eric Gardner, Eric Gardner, "Wafer-scale aluminum nano-plasmonics", Proc. SPIE 9163, Plasmonics: Metallic Nanostructures and Their Optical Properties XII, 91633B (10 September 2014); doi: 10.1117/12.2062633; https://doi.org/10.1117/12.2062633


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