28 August 2014 Progress towards a MEMS tunable infrared filter using porous silicon
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Abstract
The unique optical properties of porous silicon show it to be a promising material for imaging and spectroscopy in the mid-infrared and long-infrared wavelength ranges. A tunable MEMS filter using porous silicon as a high-reflectivity layer is proposed. Measurements on fabricated porous silicon-based distributed Bragg reflectors and Fabry-Perot etalons are presented.
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Dmitry A. Kozak, Dmitry A. Kozak, Todd Stievater, Todd Stievater, Marcel Pruessner, Marcel Pruessner, William Rabinovich, William Rabinovich, } "Progress towards a MEMS tunable infrared filter using porous silicon", Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (28 August 2014); doi: 10.1117/12.2060925; https://doi.org/10.1117/12.2060925
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