28 August 2014 Formation of sub-wavelength pitch regular structures employing a motorized multiple exposure Lloyd's mirror holographic lithography setup
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Abstract
This paper presents a custom designed, fully automated UV holographic lithography system based on Lloyd‘s mirror interferometer geometry. This system was used to record large area (50×50 mm2) 1D and 2D periodic patterns with periodicity of 288 nm in a positive tone photoresist layer spin coated on crystalline silicon substrate. Produced structures were investigated with atomic force and scanning electron microscopes.
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Dainius Virganavičius, Dainius Virganavičius, Linas Šimatonis, Linas Šimatonis, Aušrine Jurkevičiūtė, Aušrine Jurkevičiūtė, Tomas Tamulevičius, Tomas Tamulevičius, Sigitas Tamulevičius, Sigitas Tamulevičius, } "Formation of sub-wavelength pitch regular structures employing a motorized multiple exposure Lloyd's mirror holographic lithography setup", Proc. SPIE 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91701I (28 August 2014); doi: 10.1117/12.2061191; https://doi.org/10.1117/12.2061191
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