Paper
27 August 2014 Ultra-thin metal oxide based light controlled converter for sensing surface chemicals
Arūnas Šetkus, Virginijus Bukauskas, Audružis Mironas, Šarūnas Vaškelis
Author Affiliations +
Abstract
The thin film technology is used to intentionally combine functional properties of metal oxides at the nanoscale. An ultra thin construction of metal oxide layers is sandwiched between the metal contacts and a system with the gas sensitivity is made and characterized. The built in potential differences in the construction results a combination of the photovoltaic effect and the electrical response to the gas-surface interaction. The response is detected at the ambient temperature, it is sufficiently fast for the practical purposes and is reversible without and with assistance of light even if the response memristance exists. The parameters of the sensor can be intentionally modified by the thin film technology.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arūnas Šetkus, Virginijus Bukauskas, Audružis Mironas, and Šarūnas Vaškelis "Ultra-thin metal oxide based light controlled converter for sensing surface chemicals", Proc. SPIE 9172, Nanostructured Thin Films VII, 91720L (27 August 2014); https://doi.org/10.1117/12.2061535
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Metals

Oxides

Thin films

Scanning probe microscopy

Signal detection

Sensors

Biological and chemical sensing

RELATED CONTENT

Ti Mo and Mo W mixed oxides for gas sensing...
Proceedings of SPIE (November 13 2002)
Chemical gas sensors on silicon
Proceedings of SPIE (September 15 1995)

Back to Top