27 August 2014 Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition
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Abstract
Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.
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Sung Jun Jang, Sung Jun Jang, Alireza Bonakdar, Alireza Bonakdar, Hooman Mohseni, Hooman Mohseni, } "Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition", Proc. SPIE 9172, Nanostructured Thin Films VII, 91720T (27 August 2014); doi: 10.1117/12.2062301; https://doi.org/10.1117/12.2062301
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