8 September 2014 Technique for AFM tip characterization
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Abstract
In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from the current tip characterizer.
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Ndubuisi G. Orji, Ndubuisi G. Orji, Hiroshi Itoh, Hiroshi Itoh, Chunmei Wang, Chunmei Wang, Ronald G. Dixson, Ronald G. Dixson, } "Technique for AFM tip characterization", Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917305 (8 September 2014); doi: 10.1117/12.2062759; https://doi.org/10.1117/12.2062759
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