Scatterometric characterization of diffractive optical elements

Toni Saastamoinen; Hannu Husu; Janne Laukkanen; Samuli Siitonen; Jari Turunen; Antti Lassila

doi:10.1117/12.2061699

27 August 2014 Scatterometric characterization of diffractive optical elements

Toni Saastamoinen, Hannu Husu, Janne Laukkanen, Samuli Siitonen, Jari Turunen, Antti Lassila

Proceedings Volume 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII; 91730I (2014) https://doi.org/10.1117/12.2061699
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM.

Citation Download Citation

Toni Saastamoinen, Hannu Husu, Janne Laukkanen, Samuli Siitonen, Jari Turunen, and Antti Lassila "Scatterometric characterization of diffractive optical elements", Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 91730I (27 August 2014); https://doi.org/10.1117/12.2061699

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