Development of transparent and conductive Al doped Zn<sub>1-x</sub>Mg<sub>x</sub>O thin film by sol-gel process with two-step annealing

Lei Meng; Shinsuke Miyajima; Makoto Konagai

doi:10.1117/12.2060236

7 October 2014 Development of transparent and conductive Al doped Zn_1-xMg_xO thin film by sol-gel process with two-step annealing

Lei Meng; Shinsuke Miyajima; Makoto Konagai;

Author Affiliations +

Proceedings Volume 9177, Thin Films for Solar and Energy Technology VI; 91770G (2014) https://doi.org/10.1117/12.2060236
Event: SPIE Solar Energy + Technology, 2014, San Diego, California, United States

Abstract

Al doped Zn_1-xMg_xO (AZMO) thin film was developed by sol-gel process with two-step annealing. Effect of annealing temperature on structural, optical and electrical properties was investigated. It was found that first annealing mainly determines the film crystallinity and grain size, while the second annealing plays a critical role in activating dopant. All of AZMO thin films show a (002) preferential orientation and a high transmittance of over 85% in wavelength region from 400 nm to 1500 nm. A resistivity of 2.1×10^-2 Ω∙cm was achieved for a film with an optical bandgap of 3.6 eV.

Citation Download Citation

Lei Meng, Shinsuke Miyajima, Makoto Konagai, "Development of transparent and conductive Al doped Zn_1-xMg_xO thin film by sol-gel process with two-step annealing", Proc. SPIE 9177, Thin Films for Solar and Energy Technology VI, 91770G (7 October 2014); doi: 10.1117/12.2060236; https://doi.org/10.1117/12.2060236

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